Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170989 | Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity | Wolfram Fliegel, Christoph Klement, Christa Willnauer, Max Scheffer-Czygan, André Kleinwechter +2 more | 2021-11-09 |