Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971332 | Plasma processing apparatus and plasma processing method | Hiroshi Yakushiji, Yuto Watanabe | 2021-04-06 |
| 10917960 | Deposition apparatus | Masahiro Atsumi, Hidekazu Nishimura, Hiroshi Yakushiji | 2021-02-09 |