Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111578 | Atomic layer deposition of fluoride thin films | Jeffrey W. Elam, Anil U. Mane | 2021-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111578 | Atomic layer deposition of fluoride thin films | Jeffrey W. Elam, Anil U. Mane | 2021-09-07 |