Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11142484 | Component for semiconductor production device, and production method of component for semiconductor production device | Hideo Tange, Motoki HOTTA, Takamichi Ogawa | 2021-10-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11142484 | Component for semiconductor production device, and production method of component for semiconductor production device | Hideo Tange, Motoki HOTTA, Takamichi Ogawa | 2021-10-12 |