Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187977 | Imprint apparatus, imprint method, and method of manufacturing article | Naoki Murasato | 2021-11-30 |
| 11169452 | Measurement apparatus, exposure apparatus, and method of manufacturing article | Hironori Maeda | 2021-11-09 |