Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145050 | Pattern inspection apparatus and pattern inspection method | Takafumi Inoue, Manabu Isobe, Hiroteru Akiyama | 2021-10-12 |
| 11107660 | Multi-charged particle beam image acquisition apparatus and multi-charged particle beam image acquisition method | — | 2021-08-31 |