Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042687 | Fast freeform source and mask co-optimization method | Luoqi Chen, Yu Cao | 2021-06-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042687 | Fast freeform source and mask co-optimization method | Luoqi Chen, Yu Cao | 2021-06-22 |