Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10900119 | Tungsten precursor and method of forming Tungsten containing layer using the same | Soyoung Lee, Jaesoon Lim, Akio Saito, Tsubasa Shiratori, Yutaro Aoki | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10900119 | Tungsten precursor and method of forming Tungsten containing layer using the same | Soyoung Lee, Jaesoon Lim, Akio Saito, Tsubasa Shiratori, Yutaro Aoki | 2021-01-26 |