Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111256 | High purity trisilylamine, methods of making, and use | Barry Ketola, Brian D. Rekken, Michael Telgenhoff, Xiaobing Zhou | 2021-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111256 | High purity trisilylamine, methods of making, and use | Barry Ketola, Brian D. Rekken, Michael Telgenhoff, Xiaobing Zhou | 2021-09-07 |