Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205584 | Member for semiconductor manufacturing apparatus and method for producing the same | — | 2021-12-21 |
| 10930539 | Electrostatic chuck heater | Rishun Kin, Natsuki HIRATA | 2021-02-23 |