Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126079 | Nano-fabrication system with cleaning system for cleaning a faceplate of a dispenser and method of cleaning the faceplate | Craig William Cone, Roger R. Wenzel, Jason Battin, Antoine Dellinger | 2021-09-21 |
| 11106129 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2021-08-31 |
| 11034029 | Joint structure for robot | — | 2021-06-15 |
| 10961750 | Cover unit | Kenneth Carrier, Koichiro Iwanaga | 2021-03-30 |