Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127627 | Method for forming an interconnection structure | Frederic Lazzarino, Juergen Boemmels | 2021-09-21 |
| 11061315 | Hybrid optical and EUV lithography | Jia Zeng, Lei Sun, Geng Han | 2021-07-13 |