Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053582 | Support including an electrostatic substrate carrier | Laurent Roux | 2021-07-06 |
| 10923325 | Method of controlling an implanter operating in plasma immersion | Laurent Roux | 2021-02-16 |