Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193205 | Source material container | Yuichi FURUYA, Hiroyuki Mori, Eiichi KOMORI, Tomohisa KIMOTO | 2021-12-07 |
| 10950417 | Substrate processing apparatus and substrate loading mechanism | Seishi Murakami, Takayuki Kamaishi | 2021-03-16 |