Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042101 | Vertical control method for use in lithography machine | Xianying Wang, Zhiyong Yang | 2021-06-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042101 | Vertical control method for use in lithography machine | Xianying Wang, Zhiyong Yang | 2021-06-22 |