Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10988373 | MEMS component having low-resistance wiring and method for manufacturing it | — | 2021-04-27 |
| 10954120 | Micromechanical sensor that includes a stress decoupling structure | Jochen Beintner | 2021-03-23 |