Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107693 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, James Paris, HaiAu PhanVu +2 more | 2021-08-31 |