Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187986 | Apparatuses for reducing metal residue in edge bead region from metal-containing resists | Mollie Waller, Kai-Li Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark | 2021-11-30 |
| 11098070 | Organotin clusters, solutions of organotin clusters, and application to high resolution patterning | Stephen T. Meyers, Kai-Li Jiang, William Earley, Jeremy T. Anderson | 2021-08-24 |