Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120965 | Beam blanking device for a multi-beamlet charged particle beam apparatus | Eoin Horgan | 2021-09-14 |
| 10923313 | Charged particle beam device and method of operating a charged particle beam device | — | 2021-02-16 |