Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187986 | Apparatuses for reducing metal residue in edge bead region from metal-containing resists | Mollie Waller, Brian J. Cardineau, Kai-Li Jiang, Stephen T. Meyers, Benjamin L. Clark | 2021-11-30 |