Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930468 | Charged particle beam apparatus using focus evaluation values for pattern length measurement | Hiroko Takeuchi | 2021-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930468 | Charged particle beam apparatus using focus evaluation values for pattern length measurement | Hiroko Takeuchi | 2021-02-23 |