Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189487 | Method and apparatus for high pressure cure of flowable dielectric films | Aravind S. Killampalli, Chad Byers, Jay P. Gupta | 2021-11-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189487 | Method and apparatus for high pressure cure of flowable dielectric films | Aravind S. Killampalli, Chad Byers, Jay P. Gupta | 2021-11-30 |