Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061373 | Method and system for calculating probability of success or failure for a lithographic process due to stochastic variations of the lithographic process | Gurdaman Khaira, Germain Louis Fenger, Azat Latypov, Yuri Granik | 2021-07-13 |