Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061330 | Methods and apparatuses for coating photoresist | Xiangang Luo, Yanqin WANG, Zeyu Zhao, Ping Gao, Xiaoliang Ma +2 more | 2021-07-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061330 | Methods and apparatuses for coating photoresist | Xiangang Luo, Yanqin WANG, Zeyu Zhao, Ping Gao, Xiaoliang Ma +2 more | 2021-07-13 |