Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088009 | Support table, support table assembly, processing arrangement, and methods thereof | Bernhard Goller, Daniel J. Brunner, Lukas Ferlan, Markus Ottowitz | 2021-08-10 |
| 10985041 | Method and apparatus for use in wafer processing | Thomas Fischer, Gerald Lackner, Michael Lecher | 2021-04-20 |