Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183361 | Charged particle beam device and method for inspecting and/or imaging a sample | Bernd Wöllert, Birgit Schabinger | 2021-11-23 |
| 10978270 | Charged particle beam device, interchangeable multi-aperture arrangement for a charged particle beam device, and method for operating a charged particle beam device | Thomas Jasinski | 2021-04-13 |