Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11021364 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2021-06-01 |
| 10906803 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2021-02-02 |