Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11174160 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2021-11-16 |
| 11111138 | Planar cavity mems and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2021-09-07 |