Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171013 | Leveraging precursor molecular composition and structure for atomic layer etching | Kang-Yi Lin, Chen-Hao Li | 2021-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171013 | Leveraging precursor molecular composition and structure for atomic layer etching | Kang-Yi Lin, Chen-Hao Li | 2021-11-09 |