Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11167980 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper +1 more | 2021-11-09 |
| 11111136 | Use of a reactive, or reducing gas as a method to increase contact lifetime in micro contact MEMS switch devices | John M. Cotte, Nils D. Hoivik | 2021-09-07 |
| 11111139 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2021-09-07 |
| 11104572 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2021-08-31 |