Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011387 | Wet etching of samarium selenium for piezoelectric processing | Matthew W. Copel, Yu Luo, Paul M. Solomon | 2021-05-18 |
| 10930519 | Wet etching of samarium selenium for piezoelectric processing | Matthew W. Copel, Yu Luo, Paul M. Solomon | 2021-02-23 |