Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004716 | Electrostatic chuck assembly and semiconductor manufacturing apparatus including the same | — | 2021-05-11 |
SY
Song Yang
Overall (2021): #254,804 of 548,734Top 50%
1
Patents 2021