Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009787 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hitoshi Maeda, Ryo Ohkubo | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009787 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hitoshi Maeda, Ryo Ohkubo | 2021-05-18 |