Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022875 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Ryo Ohkubo | 2021-06-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022875 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Ryo Ohkubo | 2021-06-01 |