SG

Shuhei Goto

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #264,510 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11189481 Substrate processing apparatus and substrate processing method Tomohiro Kaneko 2021-11-30