Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10942452 | Method for making microstructures and photolithography mask plate | Mo Chen, Qun Li, Li Zhang, Yuan-Hao Jin, Shou-Shan Fan | 2021-03-09 |
| 10942453 | Method for making microstructures and photolithography mask plate | Mo Chen, Qun Li, Li Zhang, Yuan-Hao Jin, Shou-Shan Fan | 2021-03-09 |
| 10942454 | Method for making microstructures and photolithography mask plate | Mo Chen, Qun Li, Li Zhang, Yuan-Hao Jin, Shou-Shan Fan | 2021-03-09 |