Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892158 | Manufacturing method of a semiconductor device and a plasma processing apparatus | Yohei Ishii, Satoshi Sakai, Kenji Maeda | 2021-01-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892158 | Manufacturing method of a semiconductor device and a plasma processing apparatus | Yohei Ishii, Satoshi Sakai, Kenji Maeda | 2021-01-12 |