Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910217 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Yoshimasa NAGATOMI | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910217 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Yoshimasa NAGATOMI | 2021-02-02 |