Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164744 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi | 2021-11-02 |
| 11043392 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kotaro Murakami, Naoharu Nakaiso, Tetsuya Takahashi | 2021-06-22 |
| 11017218 | Suspicious person detection device, suspicious person detection method, and program | — | 2021-05-25 |
| 10922571 | Information processing apparatus, information processing method, and program | — | 2021-02-16 |