Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049687 | Stage apparatus and charged particle beam apparatus | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe, Hironori Ogawa +2 more | 2021-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049687 | Stage apparatus and charged particle beam apparatus | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe, Hironori Ogawa +2 more | 2021-06-29 |