Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017982 | Composite charged particle beam apparatus and control method thereof | Yasuhiko Sugiyama, Naoko Hirose | 2021-05-25 |
| 11017988 | Charged particle beam apparatus | Yasuhiko Sugiyama, Yasutaka Otsuka | 2021-05-25 |