Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177113 | Charged particle beam apparatus and control method thereof | Tatsuya Asahata, Atsushi Uemoto | 2021-11-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177113 | Charged particle beam apparatus and control method thereof | Tatsuya Asahata, Atsushi Uemoto | 2021-11-16 |