Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11046869 | Polishing liquid, polishing liquid set, and substrate polishing method | Toshiaki Akutsu, Hisataka Minami, Tetsuro Yamashita, Masako AOKI, Masato Fukasawa | 2021-06-29 |
| 10946494 | Polishing agent, stock solution for polishing agent, and polishing method | Masayuki Hanano, Masaya Nishiyama, Yutaka Goh, Haruaki Sakurai | 2021-03-16 |