Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927455 | Assembly of chamber lid and ceiling for semiconductor processes and film deposition | — | 2021-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927455 | Assembly of chamber lid and ceiling for semiconductor processes and film deposition | — | 2021-02-23 |