Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062934 | Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers | Werner Volz | 2021-07-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062934 | Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers | Werner Volz | 2021-07-13 |