Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150077 | Heterodyne laser interferometer based on integrated secondary beam splitting component | Xiaobo Su, Haijin Fu | 2021-10-19 |
| 11143529 | Cantilever linear motion reference device employing two-layer air suspension | Jianwei Wu, ZhongPu Wen, Yin Zhang, Jiwen Cui, Jiubin Tan | 2021-10-12 |