Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11212611 | MEMS microphone and manufacturing method thereof | Fuhe Sun, Chen Liu, Wenchao Jin, Wenliang Sun | 2021-12-28 |
| 11161734 | MEMS assembly and manufacturing method thereof | Chen Liu, Feng Ji, Xiaoli Zhang | 2021-11-02 |