Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119421 | Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | — | 2021-09-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119421 | Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | — | 2021-09-14 |