Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194255 | Laser processing method and laser processing system | Koji Kakizaki, Masakazu Kobayashi, Akira SUWA | 2021-12-07 |
| 11162530 | Gas laser apparatus and magnetic bearing control method | Masaharu Miki | 2021-11-02 |
| 11081850 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2021-08-03 |
| 10971883 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2021-04-06 |
| 10965087 | Laser device | Hirotaka Miyamoto | 2021-03-30 |
| 10932350 | Extreme ultraviolet light generation system | Tatsuya Yanagida | 2021-02-23 |
| 10892592 | Laser gas purifying system and laser system | Natsushi Suzuki, Masanori YASHIRO | 2021-01-12 |