Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081853 | Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device | Yoshinobu WATABE, Hiroshi Furusato | 2021-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081853 | Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device | Yoshinobu WATABE, Hiroshi Furusato | 2021-08-03 |